{"id":1063,"date":"2022-04-07T20:03:49","date_gmt":"2022-04-07T20:03:49","guid":{"rendered":"https:\/\/mslab.atomki.hu\/infrastruktura\/masodlagos-semlegesreszecske-ion-tomegspektrometer-snms-sims\/"},"modified":"2022-04-14T21:46:45","modified_gmt":"2022-04-14T21:46:45","slug":"secondary-neutral-particle-ion-mass-spectrometer-snms-sims","status":"publish","type":"page","link":"https:\/\/mslab.atomki.hu\/en\/infrastructure\/secondary-neutral-particle-ion-mass-spectrometer-snms-sims\/","title":{"rendered":"Secondary neutral-particle\/ion mass spectrometer (SNMS\/SIMS)"},"content":{"rendered":"

[vc_row][vc_column][vc_custom_heading source=”post_title” font_container=”tag:h3|text_align:left” use_theme_fonts=”yes”][vc_text_separator title=”INFRASTRUCTURE” title_align=”separator_align_left” color=”custom” style=”dotted” border_width=”2″ css_animation=”right-to-left” accent_color=”#483d8b”][\/vc_column][\/vc_row][vc_row][vc_column][vc_column_text]The secondary neutral particle \/ ion mass spectrometer (SNMS \/ SIMS) allows the analysis of concentration distributions in thin films and surface coatings by nanometer resolution.<\/span><\/strong>[\/vc_column_text][vc_column_text]It is suitable for the study of the depth distribution of the components of multi-layer systems with a unique layer thickness of up to 1-2 nm, for the study of the composition of the boundary layers deeper than the surface. It can also be used to study the depth distribution of additive components in semiconductor and polymer systems.[\/vc_column_text][vc_column_text]<\/p>\n

Technical parameters<\/strong><\/span><\/p>\n\n\n\n\n\n\n\n\n\n\n\n\n
Plasma<\/td>\nAr, Ne, Kr, Xe<\/td>\n<\/tr>\n
Sputtering speed<\/td>\n~0,1 nm\/s<\/td>\n<\/tr>\n
Ion energy<\/td>\n100 eV – 2 keV<\/td>\n<\/tr>\n
Mass spectrometer<\/td>\nBalzers QMG 422<\/td>\n<\/tr>\n
Accessable mass region<\/td>\n0 – 340 amu<\/td>\n<\/tr>\n
Sensitivity<\/td>\n1 ppm<\/td>\n<\/tr>\n
Depth resolution<\/td>\n1-2 nm<\/td>\n<\/tr>\n
Sample holder<\/td>\nheatable upto 600 o<\/sup>C<\/td>\n<\/tr>\n
<\/td>\ncoolable upto -180 o<\/sup>C<\/td>\n<\/tr>\n
<\/td>\nx – y scanning possibility<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n

[\/vc_column_text][\/vc_column][\/vc_row][vc_row][vc_column][vc_row_inner][vc_column_inner width=”1\/2″][vc_single_image image=”1140″ img_size=”full”][\/vc_column_inner][vc_column_inner width=”1\/2″][vc_single_image image=”1143″ img_size=”full”][\/vc_column_inner][\/vc_row_inner][vc_row_inner][vc_column_inner width=”1\/2″][vc_single_image image=”1137″ img_size=”full”][\/vc_column_inner][vc_column_inner width=”1\/2″][vc_single_image image=”1147″ img_size=”full”][\/vc_column_inner][\/vc_row_inner][\/vc_column][\/vc_row][vc_row][vc_column][vc_btn title=”Back to INFRASTRUCTURE main page” style=”outline-custom” outline_custom_color=”#000000″ outline_custom_hover_background=”#483d8b” outline_custom_hover_text=”#ffffff” shape=”round” size=”sm” i_icon_fontawesome=”fas fa-arrow-left” add_icon=”true” link=”url:https%3A%2F%2Fmslab.atomki.hu%2Fen%2Finfrastruktura%2F|title:Publik%C3%A1ci%C3%B3″][\/vc_column][\/vc_row]<\/p>\n<\/div>","protected":false},"excerpt":{"rendered":"

[vc_row][vc_column][vc_custom_heading source=”post_title” font_container=”tag:h3|text_align:left” use_theme_fonts=”yes”][vc_text_separator title=”INFRASTRUCTURE” title_align=”separator_align_left” color=”custom” style=”dotted” border_width=”2″ css_animation=”right-to-left” accent_color=”#483d8b”][\/vc_column][\/vc_row][vc_row][vc_column][vc_column_text]The secondary neutral particle \/ ion mass spectrometer (SNMS \/ SIMS) allows the analysis of concentration [\u2026]<\/span><\/p>\n","protected":false},"author":1,"featured_media":1140,"parent":1049,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"inline_featured_image":false,"footnotes":""},"class_list":["post-1063","page","type-page","status-publish","has-post-thumbnail","hentry"],"_links":{"self":[{"href":"https:\/\/mslab.atomki.hu\/en\/wp-json\/wp\/v2\/pages\/1063","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/mslab.atomki.hu\/en\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/mslab.atomki.hu\/en\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/mslab.atomki.hu\/en\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/mslab.atomki.hu\/en\/wp-json\/wp\/v2\/comments?post=1063"}],"version-history":[{"count":12,"href":"https:\/\/mslab.atomki.hu\/en\/wp-json\/wp\/v2\/pages\/1063\/revisions"}],"predecessor-version":[{"id":1149,"href":"https:\/\/mslab.atomki.hu\/en\/wp-json\/wp\/v2\/pages\/1063\/revisions\/1149"}],"up":[{"embeddable":true,"href":"https:\/\/mslab.atomki.hu\/en\/wp-json\/wp\/v2\/pages\/1049"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/mslab.atomki.hu\/en\/wp-json\/wp\/v2\/media\/1140"}],"wp:attachment":[{"href":"https:\/\/mslab.atomki.hu\/en\/wp-json\/wp\/v2\/media?parent=1063"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}