Kétsugaras pásztázó elektronmikroszkóp (FIB-SEM)


The FIB-SEM equipment is an ultra-high-resolution microscope that provides sample preparation and 3D characterization for the widest range of samples. 

Application of Gallium ion-gun allows for preparation of site-specific transmission samples (TEM lamella), analyse them directly in the microscope by transmission detector or move sample to the Transmission Electron Microscope. Microscope equipped with EDS (Energy Dispersive Spectroscopy) detector for elemental composition analysis and with EBSD (Electron Backscatter Diffraction) detector, which allows having crystallographic information about the microstructure of a sample.