D.M. Zayachuk, Y.D. Zayachuk, Cs. Buga, V.E.Slynko, A.Csík
DOI: 10.1016/j.vacuum.2021.110058
Published: 5 January 2021
D.M. Zayachuk, Y.D. Zayachuk, Cs. Buga, V.E.Slynko, A.Csík
DOI: 10.1016/j.vacuum.2021.110058
Published: 5 January 2021
Abstract
Interplay between preferential sputtering of multicomponent solids and topology of sputtered surface has been studied using a sequence of IVB tellurides PbTe, SnTe, and GeTe. The first experimental observation of the impact of near-non-preferential sputtering on the surface topology of multicomponent materials was made. In the example of SnTe, it was found that a sputtered surface resulting from its near-non-preferential sputtering is always covered with a dense array of cones of nanometer range of height. This observation opens the possibility for the simple method of formation of dense arrays of conical structures on solid surfaces by ordinary ion beam sputtering. Our experimental results show that to achieve this, a multicomponent composition, constituents of which are sputtered near-non-preferentially, has to be created.